To Step Up, Semiconductor Lithography Steps Down – Way Down
For semiconductors, smaller is better. That’s why the industry may soon take a big step down. On the horizon is a switch from 193- to 13.5-nm-wavelength lithography. This extreme-ultraviolet (EUV) technology eventually could allow an almost tenfold shrinking of current chip features. The surest sign that EUV is about to be deployed after years of development is money, said Stefan Wurm. He is associate director of lithography at the Albany, N.Y., branch of Sematech, the Austin, Texa...
Photonics Spectra, August 2010