Piezo Wafer Stage
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
AUBURN, Mass., July 24, 2024 — 
The 4-DOF module from PI is a wafer inspection solution that can correct for rotational wafer misalignment while taking wafer thickness and machine static characteristics into account. Based on a hybrid kinematics design the module combines Piezo-Walk® motors and piezo stacks to achieve both long travel and highly dynamic motion. The 4-DOF module features a high-stiffness design that provides fast step and settle better than 10 ms and position stability better than 0.05 µrad.
https://www.pi-usa.us/en
/Buyers_Guide/PI_Physik_Instrumente_LP_Motion_Control_Air/c11819
Published: July 2024
REQUEST INFO ABOUT THIS PRODUCT
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:
Message:
When you click "Send Request", we will record and send your personal contact information to PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our
Privacy Policy and
Terms and Conditions of Use.
Register or login to auto-populate this form:
Login
Register
* Required