Coherent Debuts All-Solid-State, CW, Deep-UV Laser for Semiconductor Metrology at Semicon West
Jul 18, 2001 — Santa Clara, Calif., July 18 -- Coherent Laser Division (CLD) announced that it will introduce the Azure continuous-wave (CW), diode-pumped, deep-ultraviolet (UV) laser at Semicon West in San Francisco, California, July 16-18, at booth #3034. A "hands-free" 266-nm laser source, the Azure has been specifically designed for integration into semiconductor metrology tools. "The near diffraction-limited beam of the Azure has ultra-low amplitude noise that is characteristic of a single-frequency...