SEMI Forum Highlights Emerging Technologies
Mar 11, 2005 — BOSTON, March 11 -- The potential of immersion lithography to extend the semiconductor roadmap and the application of "touchless" automation to improve manufacturing productivity were topics at a SEMI New England breakfast forum held yesterday at the Renaissance Hotel in Bedford, Mass. Michael Passow, senior manager of technology development and deployment at IBM East Fishkill, said the challenge for any new fabrication facility, or "fab," was how to reach high-volume, high-yield production...