White Light Interferometry for Highly Accurate Thickness Measurements
White light interferometry (WLI) is a common system of measurement with a long history and a variety of applications, which currently include surface profiling1, medical imaging, and — as in the past — thickness measurement. Also known as coherence scanning interferometry (CSI), vertical scanning interferometry (VSI), and optical coherence tomography (OCT), these systems, regardless of their names, are characterized by the same components: a broadband light source, reflection from one or more...
Photonics Spectra, September 2018