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PI Physik Instrumente - Space Qualified Steering LB LW 12/24

Ultratech Chooses TMC Vibration Control System

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PEABODY, Mass., Feb. 7 -- Technical Manufacturing Corp. (TMC) announced that Ultratech Stepper Inc. has chosen its Electro-Damp II Active Vibration Control System as the new platform for its 200- and 300-mm Saturn Spectrum and Titan Wafer Stepper family. Ultratech plans to incorporate Electro-Damp II into its steppers for semiconductor, advanced packaging, microlithography, nanotechnology and optical networking applications. Each patented Electro-Damp II system will include TMC’s DC-2000 digital controller, noncontacting electronic valving system, Gimbal Piston isolator and high-force linear...Read full article

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    Published: February 2003
    Active Vibration Control SystemCommunicationsElectro-DampindustrialNews & FeaturesTechnical ManufacturingTmUltratechUltratech Stepper

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