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Lambda Research Optics, Inc. - DFO

New Semiconductor Lithography Makes a Splash

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Hank Hogan

Semiconductor manufacturers are about to be all wet. But that's a good thing. A new technique called immersion lithography could allow the industry to continue tracking Moore's law, which forecasts substantial annual decreases in state-of-the-art transistor sizes. Figure 1. Next-generation lithography may be all wet. Immersion lithography uses the optical properties of a liquid, typically water, to image smaller features. This conceptual design shows the favored approach, which has been dubbed "splash and flash." Courtesy of Nikon Corp. The name of the method stems from its key difference...Read full article

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    Published: October 2003
    Canon Inc.excimer lasersimmersion lithographyindustrialrefractive indexResearch & Technologysilicon waferTech Pulse

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