Nanolithography System
Heidelberg Instruments Mikrotechnik GmbHRequest Info
ZURICH, Oct. 9, 2024 — 
The NanoFrazor from Heidelberg Instruments is a nanolithography system for applications in photonics, biomimetic substrates, and local material modification through heat-induced chemical reactions or phase changes. The system can be equipped with ten parallel patterning cantilevers and includes capabilities for thermal scanning probe lithography, direct laser sublimation, and automation. The NanoFrazor enables patterning of nanostructures with lateral resolutions of 15 nm and vertical resolutions down to 2 nm and features an in-situ inspection system that offers closed-loop lithography.
https://heidelberg-instruments.com
/Buyers_Guide/Heidelberg_Instruments_Mikrotechnik_GmbH/c5963
Published: October 2024
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