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'Nanoruler' Takes Precision to the Extreme

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CAMBRIDGE, Mass., Feb. 5 -- A Massachusetts Institute of Technology (MIT) device that makes the world's most precise rulers -- with "ticks" only a few hundred billionths of a meter apart -- could impact fields from the manufacture of computer chips to space physics. The Nanoruler is 10 to 1000 times faster and more precise than other methods for patterning parallel lines and spaces (known collectively as gratings) across large surfaces more than 12 inches in diameter. Such large surfaces are key to a number of applications involving gratings, such as larger wafers for the production of...Read full article

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    Published: February 2004
    Center for Space Researchcomputer chipsgratingsindustrialMassachusetts Institute of TechnologyMITNanorulerNews & Featuresprecise rulersSpace Nanotechnology Laboratoryspace telescopes

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