Electron Tomography for Integrated Circuit Analysis
Oct 1, 2006 — To better detect nanoscale defects in integrated circuits, researchers at Cornell University in Ithaca, N.Y., and at IBM’s Thomas J. Watson Research Center in Yorktown Heights, N.Y., are exploring the suitability of a variant of electron tomography, a technique established in the life sciences. Their simulations and practical experiments suggest that incoherent bright-field electron tomography may be employed for 3-D imaging of interconnects, electromigration barriers, void structures and...