Total Interference Contrast Aids Thin-Film Engineering
Many materials manufacturing applications today, including coating deposition, semiconductor production, microelectromechanical systems (MEMS) and micromachining, require precision surface step-height measurement. To measure simple surface height structures, many of these applications still use tools such as contact profilometers, atomic force instruments and some interferometer-based systems, which frequently are complex, costly, time-consuming and difficult to set up and align. One solution...
Photonics Spectra, August 2004