FREMONT, Calif., Jan. 23 -- Therma-Wave Inc., maker of process control metrology systems used in the manufacture of semiconductors, announced the completion of its acquisition of Sensys Instruments Corp. Therma-Wave, Inc. will exchange 4,470,514 shares of common stock for shares of Sensys Instruments Corp., plus assume Sensys warrants for an additional 329,486 Therma-Wave shares. There was no cash paid as consideration in the acquisition. 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