FREMONT, Calif., Jan. 23 -- Therma-Wave Inc., maker of process control metrology systems used in the manufacture of semiconductors, announced the completion of its acquisition of Sensys Instruments Corp.
Therma-Wave, Inc. will exchange 4,470,514 shares of common stock for shares of Sensys Instruments Corp., plus assume Sensys warrants for an additional 329,486 Therma-Wave shares. There was no cash paid as consideration in the acquisition. As a result of the acquisition Sensys has become a wholly owned subsidiary of Therma-Wave, focusing primarily on the emerging market for integrated metrology.