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Testing the Limits of Excimer Lasers: Annealing for Advanced Displays

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Mass production of high-resolution displays utilizes ever-larger substrate panels, placing unique demands on the excimer laser systems used in their production.

RAINER PAETZEL and RALPH DELMDAHL, COHERENT INC.

Low-temperature polycrystalline silicon (LTPS) is increasingly used as the thin-film transistor material on the glass backplanes of high-performance displays, particularly for smartphones. These thin films are fabricated on large glass panels that then are singulated into hundreds of individual screens. Mass production of LTPS on these panels is uniquely enabled by excimer lasers, moreover excimer lasers with extremely high pulse energies. These high pulse energies are needed in order to reach the requisite high process threshold intensity over a large area. Excimer lasers enable...Read full article

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    Published: July 2016
    Glossary
    annealing
    The process of heating and slowly cooling a solid material, like glass or metal, to stabilize its thermal, electrical or optical properties or, as in semiconductor materials, to reverse lattice damage resulting from ion implantation of dopants.
    Rainer PaetzelLEDsRalph DelmdahlLasersMaterialsLight SourcesCoherentexcimer lasersannealingAMOLEDLCD low temperature polycrystalline siliconoscillatorFeatures

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