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SEMI Honors Seven Photonics Developers

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Semiconductor Equipment and Materials International recently honored seven photonics technology developers for their contributions to the advancement of semiconductor manufacturing technology: Robert Knollenberg, chairman and CEO of Research Electro-Optics and founder and former CEO of Particle Measuring Systems, for his work in developing particle-detection and -sizing techniques. Six pioneers in laser pattern-generation technology from Micronic Laser Systems and Etec Systems (formerly Ateq). The Micronic team comprised Anders Thuren, vice president of technology; Hans Buhre, chief...Read full article

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    Published: November 2001
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