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Meadowlark Optics - Wave Plates 6/24 LB 2024

Positive Light Inc.

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Indigo-DUV Laser Source

Positive Light Inc. designed the Indigo-DUV all-solid-state 193-nm laser source to fill the need for an optical metrology tool for at-wavelength characterization of deep-UV optics and detectors. The device enables precision optical metrology and calibration of 193-nm lithography stepper lenses and deep-UV spectrometers. The Los Gatos, Calif., company's design includes a Ti:sapphire oscil-lator pumped by the Evolution laser, a diode-pumped solid-state Nd:YLF laser as well as a fourth-harmonic frequency-conversion package. The Evolution laser offers power stability with less than 1...Read full article

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    Published: January 2003
    Glossary
    metrology
    Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
    deep-uv opticsdetectorsFeaturesindustrialmetrologyoptical metrology toolSensors & DetectorsSpectrometersspectroscopyTi:sapphire

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