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Excelitas Technologies Corp. - X-Cite Vitae LB 11/24

Making a MEMS

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An overview of the surface micromachining process for MEMS device fabrication.

Melinda Rose, contributing editor, [email protected]

A microelectromechanical system (MEMS) can be built either through bulk micromachining or surface micromachining techniques. In bulk micromachining (the oldest method of creating silicon-based MEMS), the microstructures are built inside the substrate, while surface micromachining, as the name implies, involves building the structures on top of the substrate. Bulk micromachining is a simple, inexpensive method used for creating MEMS with simple applications; more complicated applications require surface micromachining. The electronics for most MEMS are fabricated through processes used to...Read full article

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    Published: November 2008
    ApplicationsEverything Is IlluminatedHow To / PrimerindustrialMEMSmicromachiningMicrostructures

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