Carl Zeiss SMT AG this week closed its acquisition of Peabody, Mass.-based Alis Corp., a nanotechnology startup developing scanning ion microscopes and imaging systems. Specific terms of the deal were not disclosed. Carl Zeiss SMT, a provider of lithography optics and optical and electron beam-based inspection and measuring systems, acquired the business for its Nano Technology Systems (NTS) Div., which is also based in Oberkochen. The 36 scientists and engineers currently employed by Alis will stay with the company, now a wholly owned subsidiary of Carl Zeiss SMT. Alis's core technology and research efforts will remain in Peabody, Mass., and there are plans to hire more staff to make its helium ion microscopes. Alis co-founders Bill Ward and Nick Economou will remain with the company, as chief technology officer and company CEO, respectively. Carl Zeiss NTS said the helium ion microscopy technology developed by Alis will complement its scanning electron microscopy (SEM) technology and offer opportunities for subnanometer imaging, depth-of-focus capabilities and new image contrast features. "This will enable our customers in semiconductor manufacturing, materials and life science applications to further push existing technical boundaries and to meet their roadmap requirements beyond the current decade," said Carl Zeiss NTS Managing Director Dirk Stenkamp when the acquisition was first announced in July. Alis was founded in 2005 and financed by Kodiak Venture Partners, Arch Ventures and Intel Capital. Carl Zeiss SMT was formed from the Carl Zeiss Semiconductor Technology Group in 2001. It was originally part of the Carl Zeiss Photo Div. For more information, visit: www.smt.zeiss.com or www.aliscorporation.com