Cymer Inc., a San Diego supplier of deep ultraviolet light sources used in semiconductor manufacturing, announced that it shipped a Cymer XLA 100 series argon fluoride light source to ASML Holding NV, a provider of lithography systems for the semiconductor industry, last week.   . . .   A $7.5 million grant to Cornell University from Fred Kavli and the Kavli Foundation of Oxnard, Calif., will endow the newly established Kavli Institute for Nanoscale Science. The institute will be based on the Cornell campus in Ithaca, N.Y.