Deep ultraviolet (DUV or deep-UV) refers to a specific range of ultraviolet light with shorter wavelengths than those in the UV-A and UV-B regions. The exact wavelength range considered as DUV can vary, but it often includes wavelengths from around 100 to 300 nanometers. DUV light is shorter in wavelength and higher in energy than visible light.
DUV light covers the spectrum from approximately 100 to 300 nanometers. This range is subdivided into different sub-bands, such as UV-C (100 to 280 nm) and UV-B (280 to 315 nm).
DUV light finds various applications in scientific research, industry, and technology. Some common applications include semiconductor manufacturing, sterilization, water purification, and certain types of imaging and spectroscopy.
Semiconductor manufacturing: In the context of semiconductor manufacturing, DUV lithography is a technology used to pattern features on silicon wafers. It involves exposing a photosensitive material with DUV light to transfer a pattern onto the semiconductor material.
Sterilization and disinfection: DUV light is effective in disinfecting surfaces and air. Germicidal lamps emitting UV-C light are commonly used for sterilization purposes in medical facilities, laboratories, and other settings where microbial contamination must be minimized.
Water purification: DUV radiation is employed in water treatment systems to disinfect water by inactivating microorganisms such as bacteria and viruses. UV-C light damages the DNA or RNA of these microorganisms, preventing them from reproducing.
Scientific research: DUV light is used in various scientific experiments, particularly in studies involving the interaction of light with matter, material characterization, and photochemical processes.
It is worth noting that DUV technologies have different applications and characteristics compared to extreme ultraviolet (EUV) technologies. While EUV is used in advanced semiconductor lithography, DUV is often used in more traditional semiconductor manufacturing processes and a variety of other applications where ultraviolet light is beneficial.