NANOPOSITIONING STAGES
Nov 1, 2005 — The P-628 series manufactured by PI (Physik Instrumente) LP comprises compact, piezo-driven, closed-loop nanopositioning stages that, via their friction-free and stiff flexure system and ceramic-encapsulated Picma multilayer piezoactuators, provide...
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics