VACUUM-SAFE ACTUATOR
MKS/NewportRequest Info
Newport Corp. has expanded its NewStep series with the NSA12V6, a vacuum-compatible actuator for laser cavity optimization, for adjusting beam delivery optics, for measuring beam coherence length and for other applications requiring fine adjustment of lenses and mirrors. Suitable for processes operating in a vacuum to 1026 t, the device enables precision motorized control of a variety of translation stages and mechanically adjustable mounts. Measuring 60 × 30 mm, it provides up to 11 mm of travel and uses a high-torque stepper motor to provide 0.3-µm steps or better at 1 mm/s with a maximum load of 28 newtons. The device includes a nonrotating tip that can move large loads without long-term degradation of the actuator-stage interface.
https://www.newport.com
/Buyers_Guide/MKS_Newport/c10218
Published: February 2005
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