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Photoacoustic Spectroscopy

CEA-Leti
 
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GRENOBLE, France, March 23, 2020 — Photoacoustic SpectroscopyCEA-Leti has developed a photoacoustic spectroscopy technology for the monitoring of dangerous chemical emissions and traces of gas.

The technology could reduce the cost and the size of these systems by a factor of 10 or more compared to existing tools. The system includes a fully integrated microelectromechanical system microphone dedicated to photoacoustic gas detection. It can be easily integrated into the fabrication process.

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Published: March 2020
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Productsphotoacoustic spectroscopyCEA-LetispectroscopySensors & DetectorsMEMSsafetyEurope


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