PHOTOLITHOGRAPHY STEPPER
Onto InnovationRequest Info
Azores Corp. has announced its Model 8700 PanelPrinter system for flat panel display Gen 3.5 applications. The photolithography stepper is based on proprietary step-and-repeat technology and includes a low-distortion lens in a compact footprint that measures 3.4 × 2.9 m. The system can be configured with two lens options: the 18709i lens with a resolution of 2.5 μm and a depth of focus of 30 μm, or the 18715i lens with 1.5-μm resolution and a 9-μm depth of focus. Both feature an image field diameter of 187 mm and a magnification ratio of 1.253.
https://www.ontoinnovation.com
/Buyers_Guide/Onto_Innovation/c17840
Published: October 2008
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