Metrology System
Rudolph Technologies Inc.Request Info
Rudolph Technologies Inc. has unveiled the S3000S metrology system for in-line process control of advanced diffusion and fab-wide thin-film applications. The system enables simultaneous measurement with multiwavelength, multiangle focus beam ellipsometry and deep ultraviolet reflectometry, and is built on the Vanguard-II automation platform. A MAControl module, which provides one-step nondestructive removal of the molecular airborne contamination layer on thin films, is available as an option.
http://www.rudolphtech.com
/Buyers_Guide/Rudolph_Technologies_Inc/c12952
Published: October 2009
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