Light Sources
Gigaphoton Inc.Request Info
Gigaphoton Inc. has announced two new light sources for use in semiconductor lithography.
The GT66A ArF immersion laser is equipped with a newly developed optical module to reduce spatial coherence and improve beam uniformity on the exposed surface.
The G60K KrF light source has undergone a full model change, increasing power output by a factor of 1.5× compared to the existing model by introducing a new power supply unit.
https://www.gigaphoton.com
/Buyers_Guide/Gigaphoton_Inc/c16642
Published: April 2020
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