University of Washington Buys E-Beam Tool

JEOL USA of Peabody, Mass., will install an e-beam direct-write-on-wafer lithography tool to support nanoscience research in the Pacific Northwest when the University of Washington takes delivery of a JBX-6300FS e-beam system. The new system is set be installed in the Washington Technology Center Microfabrication Lab. Funding was provided through a state-supported Star grant to Michael Hochberg, assistant professor of electrical engineering, and through a matching grant from the Washington Research Foundation. In addition to Hochberg's work in nanophotonics, the JEOL e-beam tool will support nanoscience research throughout the university and the region, in fields including bioengineering, nanoscale electronic and magnetic device research, materials science, chemical engineering, chemistry, mechanical engineering and physics. The tool will be available to students as well as researchers from several outside companies whose work includes MEMS research and production/process development.

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Published: January 2009

Glossary

lithography: Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
nano: An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
photonics: The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...

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