Suss MicroTec of Munich, Germany, a supplier of production, process and test technology for the semiconductor industry, announced it has installed several microelectromechanical systems (MEMS) production tools at Freescale Semiconductor's Oak Hill fabrication facility in Austin, Texas. The equipment includes a DSM200 series front-to-back alignment verification system and the latest-generation MA200 Compact series mask aligner, used in manufacturing MEMS, power semiconductors and optoelectronic devices, and an ABC200 series wafer bond cluster system for MEMS sensor applications. Freescale has the same equipment in its 150-mm fab in Sendai, Japan.