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DataRay Inc. - ISO 11146-Compliant Laser Beam Profilers

Scanners likely to overtake steppers

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While thereis not a complete consensus, several experts including and Intel, the worldis largest chip manufacturer, say that step-and-scan lithography machines will likely usurp the favored-son status from step-and-repeat machines as wafer sizes continue to increase.Read full article

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    Published: October 1997
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