Search
Menu
Lambda Research Optics, Inc. - Limited Time Offer

Lithography Technique Precisely Controls Nanodevice Feature Sizes

Facebook X LinkedIn Email
HONG KONG, April 19, 2022 — Researchers at the University of Hong Kong (HKU) developed an approach for nanodevice fabrication to increase the efficiency of building nanostructures that require spatially different dimensions. The researchers devised and demonstrated a practical, scalable approach to nanolithography that combines interference lithography and grayscale-patterned secondary exposure (IL-GPSE). The technique enables high-throughput nanopatterning on a wafer-scale area as well as on-demand spatial modulation of nanostructures. In nanodevice fabrication, some applications require nanostructures with...Read full article

Related content from Photonics Media



    Articles


    Products


    Photonics Handbook Articles


    White Papers


    Webinars


    Photonics Dictionary Terms


    Media


    Photonics Buyers' Guide Categories


    Companies
    Published: April 2022
    Glossary
    nano
    An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
    metasurfaces
    Metasurfaces are two-dimensional arrays of subwavelength-scale artificial structures, often referred to as meta-atoms or meta-elements, arranged in a specific pattern to manipulate the propagation of light or other electromagnetic waves at subwavelength scales. These structures can control the phase, amplitude, and polarization of incident light across a planar surface, enabling unprecedented control over the wavefront of light. Key features and characteristics of metasurfaces include: ...
    lithography
    Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
    wafer
    In the context of electronics and semiconductor manufacturing, a wafer refers to a thin, flat disk or substrate made of a semiconducting material, usually crystalline silicon. Wafers serve as the foundation for the fabrication of integrated circuits (ICs), microelectromechanical systems (MEMS), and other microdevices. Here are key points regarding wafers: Material: Silicon is the most commonly used material for wafer fabrication due to its excellent semiconductor properties, high purity,...
    photoresist
    Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a crucial component in the patterning of semiconductor wafers during the manufacturing process. The primary function of photoresist is to undergo a chemical or physical change when exposed to light, making it selectively soluble or insoluble in a subsequent development step. The general...
    meta-optics
    Meta-optics, also known as metasurface optics or flat optics, is a branch of optics that involves the design, fabrication, and utilization of artificial structures called metasurfaces to control and manipulate light at the nanoscale level. Unlike traditional optics, which typically involve bulky lenses and mirrors, meta-optics aims to achieve similar functionalities using ultrathin, planar structures composed of subwavelength nanostructures. Metasurfaces are typically composed of arrays of...
    manufacturingnanonanodevicesdevicesmetasurfacessurfaceslithographynanolithographymetalensesdevice fabricationnanodevice fabricationspatialindustrialwaferOpticsResearch & TechnologyeducationAsia Pacificphotoresistmeta-opticsLight SourcesUniversity of Hong Kong

    We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.