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Lambda Physik Gets Record Orders from Silicon Valley Group

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FT. LAUDERDALE, Florida, Oct. 19 -- Lambda Physik has received follow-on orders for its NovaLine A4020 and NovaLine K2020 lasers from Silicon Valley Group Inc. totaling $16.9 million, the company's biggest ever. Silicon Valley Group ordered the NovaLine A4020, which is an argon-fluoride, 193 nm laser with a 4 kHz repetition rate and an output power of 40 watts, specifically because of the catadioptric design of its Micrascan V high NA, high-throughput scanner. The A4020's partially narrowed beam and 4 kHz repetition rate, along with its energy dose stability, allows customers to take...Read full article

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    Published: October 2000
    industrialNews & Features

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