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Komatsu Installs First 2-kHz Deep UV Production Excimer

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TOCHIGI, Japan, Sept. 10 -- Komatsu Ltd. announced that it has completed the installation at a major Japanese chip manufacturer of the world's first 2-kHz deep UV excimer laser for use in producing silicon wafers. The company says the new laser, called the G20K, delivers twice the power of 1-kHz lasers and can perform photolithography at a higher repetition rate, leading to increased throughput. The G20K is a 248-nm KrF 2000-Hz excimer laser light source with newly designed sub-systems that double the device's life expectancy to 10 billion pulses. The device is Komatsu's fifth generation KrF...Read full article

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    Published: September 1999
    industrialNews & Features

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