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JMAR to Produce Lithography Masks for Navy

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SAN DIEGO, June 3 -- JMAR Technologies Inc., developer and supplier of proximity x-ray lithography systems and light sources, said its JMAR/SAL NanoLithography Inc. (JSAL) division, in Burlington, Vt., has received a contract from the Naval Air Warfare Center in Patuxent River, Md., for up to $10 million for sub-100 nanometer geometry next-generation lithography masks to produce advanced semiconductors. The contract, funded by the Defense Advanced Research Projects Agency (DARPA), is a two-year effort that will produce x-ray masks used in the development and production of high-performance...Read full article

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    Published: June 2002
    CommunicationsdefenseindustrialNews & Features

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