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Heriot-Watt Partners with ASML

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Heriot-Watt University has begun a five-year partnership with Netherlands-based ASML, a major supplier to the semiconductor industry, to pursue the advancement of new light source technologies. The collaboration, funded by ASML, will specifically aim to accelerate research into fundamental physics by Heriot-Watt professor John Travers, to create a direct route from lab to market for new laser technologies.

As part of the collaboration, ASML provided a new laboratory to Heriot-Watt University. Travers’ current focus is on new broad bandwidth light sources for optical metrology. The sensors in ASML’s machines must work at multiple wavelengths because they encounter various materials, each with different absorption properties.

Travers’ team has already achieved multiple patents related to its technology.

Heriot-Watt University began a similar five-year collaboration with ultrafast laser manufacturer Chromacity in December 2020.


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Published: March 2021
Glossary
lithography
Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
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