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Newport Corp. announced it has received three orders for semiconductor capital equipment with a total value of $6 million. One system, purchased by a semiconductor equipment manufacturer, is a precision motion platform that will be incorporated into a laser-based processing tool. The system uses the advanced motion control technology of Newport's DynamYX wafer positioning stages to deliver movement in multiple axes. The other two orders, from a producer of semiconductor metrology tools, are for integrated opto-mechanical subassemblies. One forms part of an in-line wafer inspection system and the other is incorporated into a reticle metrology tool. The subassemblies feature high-performance laser optics, manufactured with Newport's magnetorheological finishing technology, and precision optical mounts. Newport said it expects to complete shipment of the orders this fall.. . .C. Mark Melliar-Smith has been appointed COO of Molecular Imprints Inc. (MII), an Austin, Texas, manufacturer of step and flash imprint lithography. Melliar-Smith, who is also a member of MII's board, was formerly CEO and president of International Sematech. Prior to that, he was CTO of Lucent Technologies Microelectronics, the forerunner of Agere Systems.
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Published: March 2004
Glossary
metrology
Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
industrialmetrologyMolecular ImprintsMotion ControlNewportNews Briefsopto-mechanicalPhotonics Tech BriefssemiconductorsLasers

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