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Companies Partner to Develop Multiaxis MEMS Gyroscopes

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The SAES Getters Group of Lainate, Italy, a provider of getter technology for high-vacuum applications, and Geneva-based STMicroelectronics, a manufacturer of MEMS (microelectromechanical systems) devices, announced they will partner to produce next-generation MEMS gyroscopes at their facilities near Milan, Italy. SAES' PageWafer getter thin-films will be integrated into STMicroelectronics' gyroscopes to measure angular speeds with higher device sensitivity and stability. Integrated circuits containing MEMS effectively exploit silicon's electrical and mechanical properties, while traditional semiconductors utilize just the electrical. Exploiting silicon's mechanical properties is a  recent phenomenon, and MEMS gyroscopes, smaller than the diameter of a human hair, are a relatively new frontier, the companies said. Applications for the new devices include mobile phones, portable devices, MP3/MP4 players, PDAs, gaming and navigation devices, and possibly as image stablizers in camcorders and digital cameras. ST said it expects to ramp to industrial volume production in the first half of 2008.
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Published: May 2007
Glossary
getter
In vacuum deposition, a device that removes contaminants from the vacuum chamber.
gyroscope
A gyroscope is a mechanical device consisting of a spinning disk or wheel mounted on a spinning axis in such a way that its orientation remains fixed regardless of any movement of its mounting structure. Gyroscopes are used to measure or maintain orientation and angular velocity in various applications, such as navigation systems, aircraft stabilization, robotics, and more. The principle behind a gyroscope is based on the conservation of angular momentum, where the spinning motion of the...
nano
An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
Employmentgettergyroscopehigh-vacuumindustrialintegrated circuitsMEMSnanoNews BriefsPageWaferphotonicsPhotonics Tech BriefsSAESSAES GetterssemiconductorsSTSTMicroelectronicsthin-filmsWafers

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