AMSTERDAM, May 23 -- ASM Lithography NV (ASML), a Dutch semiconductor equipment maker, said that it had finalized its acquisition of Silicon Valley Group Inc. ASML won approval from the US government earlier this month to take over California-based SVG, based on ASML's intent to sell Tinsley Laboratories, Silicon Valley Group's optical unit. The Pentagon had expressed concern that Tinsley's technology, some of it used for spy satellites, could fall into the wrong hands.