Lithography systems provider ASML Holding NV (ASML) of Veldhoven, Netherlands, and Carl Zeiss SMT, an Oberkochen, Germany-based maker of optical and electron beam-based inspection and measurement systems, announced they will collaborate with Canon Inc. for the global cross-license of patents in semiconductor lithography and optical components used to manufacture integrated circuits. The agreement means that the companies can market products based on technology covered by the other party’s lithography equipment-related patents. There will be no technology transfer. The companies said in a joint statement that the cross-license will help them compete more freely in their respective areas of technology expertise and implementation, rather than on intellectual property right.