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Characterizing the temperature-induced evolution of the shape and texture of a silicon wafer

Friday, December 10, 2021
Sensofar Metrology

Using Linkam’s precision temperature control chamber with Sensofar’s Linnik objective lens eliminates these problems and allows accurate measurement of 3D topographic profiles of nanoscale materials. S neox 3D optical profiler with a Linnik objective has been shown to be the perfect complement to perform such experimental measurements. Moreover, different brightfield objectives are compatible with the Linnik configuration, offering working distances up to 37 mm and magnifications up to 100x for applications that require high lateral resolution.

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File: 2021Linkam_Consumer_electronics3.pdf (2.35 MB)
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