Semiconductor Metrology: Will Photonics Measure Up?
The semiconductor industry’s progress toward new materials and fabrication methods is creating opportunities for effective, fast and nondestructive photonic metrology techniques. This applies along the entire chain of production, from wafer fabrication to packaging of the integrated chips. The metrology of integrated circuits, however, provides a functional snapshot of what challenges the industry confronts and what solutions photonics can provide. The gate length of transistors, for...
Photonics Spectra, December 2000