Phase-Shift Techniques Rewrite the Semiconductor Road Map
The semiconductor industry has generally followed the path of least resistance in its pursuit of denser and smaller chip features, a goal defined by the Rayleigh equation. For years, wavelength (λ) was the simplest variable to work with in this equation. However, the measure of "least resistance" has become increasingly uncertain as lithography enters the submicron regime, where delivering the beam to the wafer requires new lens materials, unfamiliar exposure sources and increasingly...
Photonics Spectra, December 2001