Z-Tip-Tilt Stage
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
AUBURN, Mass., Sept. 10, 2024 — The A-523 from PI is a Z-tip-tilt stage designed for alignment applications in optics, semiconductors, precision assembly, and photonics. The stage uses a parallel-kinematics, integrated design with only one moving platform that reduces height, center of gravity, and inertia and can be paired with a two-axis planar air-bearing stage to provide five-axis motion for semiconductor and laser processing automation. The A-523 uses linear encoders with 1-nm resolution, a direct-drive design for acceleration up to 1 g, a 10-in. diameter platform with an 18-lbs load capacity, 5 mm of Z-travel, and a rotation range of 2° for the tilt axes.
https://www.pi-usa.us/en
/Buyers_Guide/PI_Physik_Instrumente_LP_Motion_Control_Air/c11819
Published: September 2024
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