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Wafer Positioning System

Steinmeyer Mechatronik GmbHRequest Info
 
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Steinmeyer Mechatronik’s double XYZ wafer positioner offers users an economical solution for the analysis and inspection of large wafers up to 12 in. or 300 mm. The positioners have two X-axes for scanners or microscopes up to 10 kg, and two Y-axes for chucks up to 15 kg. The system is delivered with fully measured accuracy and includes cable management, motion controller, and mounting holes for housing attachments.



Published: April 2023
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Productssemiconductor wafer positioning systemdouble XYZ wafer positionerSteinmeyer Mechatronikinspectionmetrologysemiconductors300 mmXYZ stageEurope

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