Wafer Measurement System
Nikon Corp., Digital Solutions Business UnitRequest Info
The NEXIV VMZ-NWL 200 from Nikon is an automatic wafer measurement system developed to solve the challenges of wafer metrology in the back-end of the semiconductor manufacturing process. The product automatically measures 6-in. or 8-in. wafers held in a carrier according to a measurement program. It is possible to trace when the measurement was performed and by which program, helping to improve traceability. The system is designed with safety in mind and a protective cover is provided to prevent possible damage due to operator error. Operation meets SEMI international standards S2, S8, and F47.
https://www.nikon.com
/Buyers_Guide/Nikon_Corp_Digital_Solutions_Business_Unit/c10300
Published: August 2023
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