Wafer Inspection System
Hitachi High-Tech Corp.Request Info
The LS9300AD from Hitachi is a system for inspecting the front and backside of non-patterned wafer surfaces for particles and defects. In addition to the conventional dark-field laser scattering detection of foreign material and defects, the system is equipped with a differential interference contrast inspection function that enables detection of irregular defects and shallow, low aspect microscopic defects. The LS9300AD also uses the wafer edge grip method, and the rotating stage can be used in conventional products to enable front and backside wafer inspection.
http://www.hitachi-hightech.com
/Buyers_Guide/Hitachi_High-Tech_Corp/c28317
Published: March 2024
REQUEST INFO ABOUT THIS PRODUCT
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:
Message:
When you click "Send Request", we will record and send your personal contact information to Hitachi High-Tech Corp. by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our
Privacy Policy and
Terms and Conditions of Use.
Register or login to auto-populate this form:
Login
Register
* Required