Variable Beam Laser System

Focuslight Technologies Inc.Request Info

The Flux H series variable beam laser system from Focuslight Technologies Inc. is designed for pan-semiconductor manufacturing processes.

The system generates an adjustable laser beam with 4-kW power output and a 976-nm wavelength from laser sources, regulating the beam size and homogeneity through micro-optic modules. The beam is continuously adjustable in width and length from 2 to 200 mm, as the uniformity maintains as high as > 95%. Flux H has a flexible and versatile configuration with different beam size variation ranges and the corresponding working distances meeting specific application and processing requirements. It also integrates a high-speed pyrometer system that monitors the temperature of the processing area in real-time and carries out closed-loop temperature control.

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Published: August 2022

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