Vapor Deposition System
Blue Wave Semiconductors Inc.Request Info
BALTIMORE, Feb. 25, 2025 — 
The Diamond Exploratory and Applied Research Microwave Plasma Chemical Vapor Deposition (DEAR MPCVD) system from Blue Wave Semiconductors is meant for exploratory and applied research in diamond-based technologies. The system uses a microwave cavity that supports a larger diameter quartz tube with differential pumping vacuum seals, multiple optical viewports for temperature, plasma process, and growth monitoring, and a sample stage that creates efficient microwave plasma above the substrate at sizes up to 12 mm × 12 mm and at temperatures ranging from 650 °C to 1100 °C. The DEAR MPCVD system features microwave power ranging from 650 W to 1.5 kW, achieving growth rates from 0.2 µm/hr to over 10 µm/hr.
https://www.bluewavesemi.com
/Buyers_Guide/Blue_Wave_Semiconductors_Inc/c34238
Published: February 2025
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