Tripod nanopositioners

ALIO Industries LLCRequest Info

The tripod robotic manipulators from Alio Industries are used as nanopositioners for product, test and research applications in the photonics, semiconductor and microelectromechanical systems industries. They feature three and six degrees of freedom, backlash-free resolutions to 5 nm, speeds to 200 mm/s and an effective positioning envelope between 15 and 200 mm³. They combine parallel kinematics principles with ceramic servomotor and high-resolution encoder feedback systems. Ultraprecision cross roller bearing-based mechanics provide smooth and precise linear motion and total rigidity of each positioning element. The devices have a load-carrying capacity of up to 8 kg and offer 50-nm repeatability, which may be upgraded to 10 nm with an optional low-noise DC mode amplifier.

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Published: August 2007

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