Semiconductor Metrology Device
Molecular Vista Inc.Request Info
The Vista 300 from Molecular Vista Inc. is a nano infrared instrument that can be used in advanced semiconductor process monitoring and defect analysis. The instrument combines an atomic force microscope with infrared spectroscopy to provide photo-induced force microscopy that performs chemical mapping with a spatial resolution of <5 nm. The Vista 300 is designed to handle full 300-mm wafers with a 1.1 m × 1.1 m footprint and can map chemical differences between exposed and unexposed 16-nm half-pitch patterns in EUV resist films before the resist is developed.
http://www.molecularvista.com
/Buyers_Guide/Molecular_Vista_Inc/c24897
Published: August 2024
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