Pyrometer

Advanced Energy Industries Inc.Request Info

The Sekidenko 4100T pyrometer from Advanced Energy is an optical fiber thermometer that delivers high temperature measurement accuracy, a wide temperature range, and simultaneous multichannel maximum read speed for leading-edge semiconductor and adjacent thin-film applications.

Up to four different temperatures can be measured simultaneously, reducing the number of control boxes required for multi-point control, shrinking the form factor, and delivering cost-saving benefits. The high read-rate of up to 1 kHz per channel enables faster thermal response for better temperature control and uniformity of leading-edge applications such as rapid thermal processing, laser annealing, atomic layer deposition, and other advanced deposition technologies.

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Published: December 2021

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